RF & RPS Repair

X-stream RPS Repair
Part No Description Model No Type Maker

 

RPS_XSTREAM

3151806-202F

 

Advanced Energy

Specification

RF Frequency

225KHz to 667KHz

Power Accuracy

±5% of set point or ±200W, whichever is greater (measured at equivalent plasma impedance of 1.2 ohms)

Operational load Limits

Operational load needs to be within the operational limits

Minimum plasma power

1000 W

Maximum plasma power

8000 W

Maximum Plasma voltage

145 Vrms

Maximum power supply current

107 Arms

Electrical Efficiency

Better than 80% @ full-rated power nominal line

Power Factor

Better than 0.90

Zero Setpoint

When setpoint is zero or negative or when interlock is not satisfied, digital and display read backs show less than 1W and actual power delivered is less then 1W

Duty Cycle

Continuous operation within specified operating range

Rapid OE RE Generator Repair
Part No Description Model No Type Maker

0920-00088

0920-00124

0920-00130

RF GEN_RAPID OE (Axiom Generator)

3151802-003

3151802-004

5707040-B

Advanced Energy

Specification

RF Frequency

250 to 666 kHz

Power Accuracy

Power Accuracy : referenced at plasma load +/- 5% of 200 W whichever is greater

Operational load Limits

Operational load needs to be within the operational limits

Minimum power

500 W

Maximum power

6000 W

Maximum Plasma voltage

325 Vrms

Minimum Plasma voltage

5 Arms

Maximum Primary current

120 Arms

Electrical Efficiency

Better than 80% @ full-rated power nominal line

Power Factor

Better than 0.90

Zero Setpoint

When setpoint is zero or negative or when interlock is not satisfied, digital and display read backs show less than 1W and actual power delivered is less then 1W

Duty Cycle

Continuous operation within specified operating range

MKS Revolution Repair
Part No Description Model No Type Maker

 

RF GENERATOR

AX7695LAM-10

685-045903-034

MKS

AX7690 Series Astron® Fluorine Generator, Technical Specifications
Electrical Service Requirements
Item Specification

AC Power Input

180 - 228 volts (200-208 service), three phase, three-wire plus ground, 50/60 Hz, 30 AMP service recommended (26A RMS draw under full load)

AC Power cable

The ASTRONp is supplied with a 10’ un-terminated SO cable. The user will supply the appropriate connector for connection to their system.

Red, White, Black conductors

Phases A, B, C (phase insensitive)

Green conductor

Earth ground.

Primary Circuit Fuse Protection

3 x 30 A, 660 VAC fuse (not user serviceable)

Cooling Requirements
Item Specification

Ambient Air Temperature of Operation

5-40℃

Water Filtration

20 micron

Water Resistivity

Facility Water

Minimum Water Flow during operation

1.5 gpm

Minimum Water Flow during idle

0.5 gpm

Water Pressure Drop

32 +/- 3 psid at 1.5 gpm

Maximum Water Inlet Temperature

30℃

Minimum Water Inlet Pressure

Ambient dew point or 15℃, which ever is greater

Maximum Water Inlet Pressure

100 psig

Extrenal Water Connections

9/16-18 SAE/MS threads, compatible with Swagelok: SS-400-1-6ST, SS-600-2-6ST, SS-600-5-6ST fittings

Process Compatibility
Item Specification

Process Gas

O2, N2 (Contact MKS ASTeX Products for use with other gasses)

Process Gas Feed

1/4” VCR

Viton V1260-75 o-ring in gas inlet

If a downstream transport tuve is used the following are recommended:

Minimum 1.0 inch (2.5 mm) ID to minimize pressure rise and transport losses.

Made of suitable material for the process gasses.

O-rings should be of suitable material for the process gasses.

Use of baffle plates, showerheads, or other flow distribution devides between the ASTRON outlet and the process chamber will result in higher operating pressure at ASTRON than in the process chamber. For best opertion, ASTRON operating pressure specification must be met at ASTRON outlet. It is recommended that gas conductance measurements for the cleaning gas transport plumbing be carried out to ensure correct operating pressure at the ASTON (see section 3.0 for operating requirements).

Material Surfaces Exposed Directly to Vacuum and Process Gas

6061-T6 Aluminum

KALREZ 8575UP-o-ring

SiO2 - GE 124

SS 316L - gas line

Ni - VCR seal

MKS PARAGON RPS Repair
Part No Description Model No Type Maker

 

MKS_PARAGON_RPS

AX7710IPS-30

RPS

MKS

Specification

RF Frequency

400 KHz

GAS Supply

IGNITION : 100% Ar for Ignition Only

Process : UP to 6SLM of NF3 (post ignition NF3 can be added and the Ar removed)

Ignition and Operating Conditions

During Ignition : 1 to 8 Torr @ 1 to 5 slm for Ar (pressure measured at ASTRON outlet)

Post Ignition : 1 to 10 Torr post ignition 1 to 6 slm (pressure measured at ASTRON outlet)

Reactant Output (NF3 Operation)

Reactant Output (NF3 Operation) >95% dissociation across operating space, 1-10T, 1-6 slm (pressure measured at ASTRON outlet)

Duty Cycle

2 sec on time min, to 100%

Wetted Materials

PEO coating, 6061-T6 Aluminum, Chemraz®, Alumina

Control Interface

EtherCAT, opto isolated I/O

25 pin D connector, opto isolated I/O

Utilities

Power 180 to 228 VAC, 50/60 Hz, 35A, 3 phase (50A Service recommended)

Cooling water 2.0 gpm, < 30°C

Ambient 40°C max