Parts Localized

TCP
Localized Parts Equipment Process OEM P/N

TCP

LAM 300mm FLEX, FLEX45, KIYO

Etch

853-017892-201(7.1KW)

LAM ZrO2 Part

HIGH GAP HANGER

SMI : 713-037072-003

Low GAP HANGER

SMI : 713-037069-003

NUT HANGER

SMI : 839-039317-003

PAD WASHER SPACER

SMI : 713-034965-001

D-WASHER

SMI : 713-034964-001

SLEEVE

SMI : 713-027299-002 SYSTA : 713-027299-002

WASHER FLAT Confiment Ring

713-040539-001(Z)
Classification Description

Product

LAM Zirconia Part

Material

PEEK → Zirconia

Application

LAM ETCH

REV

Change the material from PEEK to ZIRCONIA

Main Supply Contractor

SK-Hynix, UMC, Micron, etc

Product description

PEEK, the original part in the SKHYNIX ETCH LAM facility, was changed to Zirconia to extend the use cycle and improve some items to be used semi-permanently

Consumable parts

CONDUCTOR, BIAS
300MM, HDPCVD, ULTIMA

0020-07180

(I)SKT, PLASMA SNSR

715-038611-002

(A)QTZ PIN_PIN, ALIGN, UPR
ELCTD, 300MM_

713-067673-002

ASSY, STUD, SOCKET.300MM;

P/N : 839-070842-004

I*)ESC WATER
MANIFOLD(ULTEM)_ULTIMA

0040-48770

ACCESSORY_FACE SEAL
GAS INJCTR(2300 POLY)

713-012659-003

(I)LIFT PIN HOLDER HOUSING

LPHH-0101

(I)LIFT PIN HOLDER BASE

LPHB-0101
ROBOT BLADE
2-6 YASKAWA & KAWASAKI Robot Blade 제작/개선
Description Application Vendor P/N SAP N/O Business Start Installation

300mm Robot Blade

YASKAWA, BROOKS KAWASAKI, PSK

 

 

Since 2011

SK Hynix

Background & Development

1. Cost reduction and delivery time improvement compared to OEM parts

Blade type

KAWASAKI OLD TYPE

KAWASAKI NEW TYPE

PSK SUPRA3 BLADE

YASKAWA BLADE

Blade test item

Flatness Test w/o wafer

Flatness Test w/o wafer

Sensor Test

Pad standard test

LAM TCR
Part Number Product name Equipment Improvement

678-031432-004

Temerature Control Ring

LAM KIYO Poly KIYO45

Arcing and durability improvement

Before After Details

SUS Pattern Heater

Film Pattern Heater causes frequent arcing between aluminum plates : the main cause of arcing is due to the gaps made by thermal expansion between materials, frequent operation, resin (silicon or epoxy) falling off, etc

Ni_Cr Wire Heater

Ni_Cr wire is inserted into the aluminum plate body to produce a structure that does not generate arcing even if gaps occur. In addition, a heater with a heating wire, which is more durable than a pattern heater, is used.

Reduces arcing, prevents film heater fail, improves heater life time, improves durability, etc

AIR LOCK FINGER
※ Localized
Equipment Process OEM P/N

LAM FLEX 300mm

ETCH

715-009191-001