Ozone Water Supply System

Ozone water supply device (Limpio Series)
Uses of ozone water

Cleaning process of semiconductor, display, OLED and other high-tech industries

Substitute for strong acid materials used in PR strip, etching process, etc

BOD, COD, SS etc purification treatment of industrial sewage/wastewater

Disinfection and sterilization of medical equipment, food production facilities

Purpose of using ozone water

It can be used as a substitute for strong acids such as H2SO4, HF, NH03, and does not generate harmful substances to the environment

It can be used in various fields depending on the concentration and has high efficiency

Use Ozone Water Only and DHF Mix for Semiconductor Fine Pattern Organic and Inorganic Cleaning

Uses of ozone water (Limpio Series)

Application: Semiconductor, Display, Pre-cleaning in OLED process, Post-cleaning

Generated concentration : 10 ~ 190 ppm

Used flow rate : 20 ~ 140 LPM

Low power high concentration ozone gas generator

Compact size and PLC automatic control

Composed of PFA acid-resistant material in all sections, zero corrosion and foreign substances

Able to provide a rapid service response with an in-house production of core parts

Additional Information

Safety design for power and gas use to block emissions and configure interlock

Additional equipment : Ozone destructor, ozone water purification equipment for after using

Patent application : 6 cases including 10-20948230000, 10-21028110000, etc.

Limpio-S30 Specification
Unit Detail Connection ETC
Dimensions

850 x 789 x 1789 mm

-

-

Power

Supply

208V 50/60Hz 60A 3phases

4P 60A terminal block

-

DI Water

Flow rate

30 l/min

1" PVDF ball V/V union

 

Pressure

> 3.0 bar

 

Temperature

< 24℃

 

PH

≤ 7

 

Cooling Water

Flow rate

8 l/min

3/8”Swagelok

 

Pressure

>1.5 bar, <5.0 bar

 

Temperature

< 23℃

 

CDA

Flow rate

40 l/min

1/4” Swagelok

 

Pressure

4.0~6.0 bar

 

Connection

1/4” VCR

 

O2

Purity

> 99.9%

1/4” VCR Male Union

 

Flow rate

10~20 l/min

 

Pressure

4.0~6.5 bar

 

N2

Purity

> 99.9%

1/4” VCR Male Union

 

Flow rate

10~20 cc/min

 

Pressure

4.0~6.5 bar

 

CO2

Purity

> 99.9%

1/4” VCR Male Union

 

Flow rate

1 l/min

 

Pressure

4.0~6.5 bar

 

Exhaust

Pressure

> 400 Pa

150A SUS Flange

Manufacture and deliver relative flanges in accordance with standard usage specifications

O3 DIW Out

O3 DI Water

30 l/min

1" piller S300(Double piping 40A)

 

O3 Return

10~25 l/min

3/4" piller S300(Double piping 40A)

Models with O3 water recovery(Limpio-S30R)

O3 Drain

7 l/min

1/2" piller S300(Double piping 40A)

Drain

Vat Drain

-

1/2" Swagelok

 

Dike Vat Drain

-

15A PVC Ball V/V 1/2" PMAIL

 

Double piping
Graph
Details (Ozone generator 14-Cell as criteria)
Water Flow Rate Ozonated Water N2 O2 Co2 Cooling Water DI Water

10 LPM

130 ppm

10 sccm

10 LPM

0.8 LPM

17℃

23℃

20 LPM

110 ppm

10 sccm

10 LPM

0.8 LPM

17℃

23℃

30 LPM

75 ppm

10 sccm

10 LPM

0.8 LPM

17℃

23℃

40 LPM

50 ppm

10 sccm

10 LPM

0.8 LPM

17℃

23℃