Item | Description |
---|---|
Model |
TCSS-300H Ex |
Refill method |
Refill from BCSS to TCSS |
Equipment size |
1200(W) x 880(D) x 2,250(H) |
Supply line |
3~12 Stick |
Residual volume management |
Weight Scale, Canister Level Sensor |
Applied gas |
TEOS, TEB, TEPO, etc |
Storage capacity |
14L, 3.7GALLON (Bulk 14L, Process 14L) |
Item | Description |
---|---|
Model |
BCSS II 200L Ex (MASTER & SLAVE) |
Refill method |
Bulk Master, Slave Auto Cross Over Supply |
Equipment size |
900(W) x 1,070(D) x 2,380(H) |
Supply line |
Maximum 9 Stick |
Residual volume management |
Weight Scale, Canister Level Sensor |
Applied gas |
TEOS, TEB, TEPO, etc |
Storage capacity |
200L |
Item | Description |
---|---|
Model |
LCSS-200HD Ex |
Refill method |
Bulk to Process |
Equipment size |
600(W) x 870(D) x 2,100(H) |
Supply line |
Maximum 4 Stick |
Residual volume management |
Weight Scale, Canister Level Sensor |
Applied gas |
TiCl4, TDMAT, BPSG, OMCTS, DEMS, 4MS, 2NTE, Cyclohexane, MDEOS, ATRP, AM31,DiPAS |
Storage capacity |
19L, 5GALLON (Bulk 19L, Process 19L) / 14L, 3.7GALLON (Bulk 14L, Process 14L) |